Zygo Corporation
Zygo Qualifire
Zygo Corporation, a business unit of AMETEK, has announced the release of its newest laser interferometer, Qualifire. The instrument is designed to support and enable demanding metrology applications in industries such as semiconductor, lithography, space-borne imaging systems, cutting-edge consumer electronics and defence.
Zygo says that the interferometer, which debuted at Photonics West in San Francisco, California on January 30, packs significant enhancements and features into a small lighter-weight package without sacrificing performance.
Erin McDonnell, Product Manager, Laser Interferometers at Zygo said: “We are excited to introduce the Qualifire to market. Its improved ergonomics make it easy-to-use, and it is more portable than many of Zygo’s other laser interferometers. Measurements made with laser interferometers tend to be sensitive to noise, contaminants, and other artifacts because of the instrument’s ablity to provide nanometre-level precision.
“An optional module available on the Qualifire, Flying Spot, actively reduces or even eliminates these artifacts, thus enhancing the reliability and repeatability of measurements. Flying Spot combines two of Zygo’s best artifact reduction technologies: Ring of Fire and Coherent Artifact Reduction. Flying Spot is particularly valuable in applications requiring high precision, including scientific research and advanced manufacturing processes.”
Qualifire brings a smart accessory interface to the new interferometer, which allows it to recognise any “smart accessory” installed and automatically apply a system error file and perform lateral calibration.
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The smallest model of Qualifire weighs approximately 20.4 kg (45 lbs) making it portable, useful for complex and delicate applications in which the interferometer must be moved or adjusted frequently according to the company.
The Qualifire features an integrated phase measuring receptacle (PMR), which Zygo says is necessary for modulating interference fringes between the test part and reference optic which creates a quantitative surface map. The company says its design provides overall mechanical stability and alignment, reduces the risk of damage or misalignment, and ensures consistent performance, reducing the need for recalibration.
Zygo says that the new device offers an improved user experience, with an accessible power button and kinematic mounting feet to make setup easier. Large control knobs allow for more accurate measurements, and integrated handles ensure safe and secure handling says the company.
The company also says that the sealed optical system and consolidated electronics allows for straightforward swapping out of various components without exposing the optics to contaminants. The device also features an optional module for artifact reduction that includes the autofocus feature, as well as an option providing a new zoom method which makes perfect registration possible and diffraction limited image sampling at all magnifications according to Zygo.
“The Qualifire maintains Zygo’s high standards in metrology while delivering the highest level of precision and optimising user experience. With improved ergonomics, it provides increased efficiency in operation and flexibility in deployment without sacrificing performance. Qualifire is a more robust, reliable, and user-friendly instrument, ready to handle the most demanding applications and environment, where precision is non-negotiable,” said Kurt Redlitz, DVP, Metrology Group.