Takano WM-10 Particle Detection System from ClassOne Equipment
Semiconductor processing equipment provider ClassOne Equipment has delivered its new particle measurement system to metrology equipment EUV chip manufacturer EUV Tech. The Takano WM-10 will provide high-sensitivity particle detection, with ClassOne hoping to replace the Surfscan systems, which is considered the current industry standard.
Key information:
- ClassOne's latest product features a high level of detection sensitivity, throughput, reliability and repeatability, as well as a suite of options.
- In addition, the Takano WM-10 will be competitively priced and readily available for customers.
- Combining all these benefits and features, the semiconductor processing equipment provider hopes its new product will replace the Surfscan system, which is considered the industry standard.
In addition to the increased detection sensitivity, the Takano WM-10 will also provide high throughput, reliability, and repeatability, as well as a suite of options. With ClassOne competitively pricing its new system, with a high level of availability for potential customers.
“A key factor in our selecting the new 300mm Takano WM-10 system was its very high-sensitivity particle detection,” said Matt Hettermann, EUV Tech Vice President of R&D. “For us, particle sensitivity is critical because we are using the new Takano tool to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft x-ray systems in the industry.”
“We have the new WM-10 running in our fab in Martinez, California,” added Hettermann. “And we’re already seeing the outstanding performance it delivers – routinely detecting particles down to 48nm. Plus, it’s configured to handle not only 300mm wafers but also 200mm and 150mm.”
ClassOne also offers a variety of previously owned semiconductors, as well as thousands of top-quality OEM parts, equipment service, support, warranties, financing, and more. The American company is the exclusive source of service, sales, and support of Takano-brand particle detection systems across Europe and North America. Also, ClassOne provides a team of specially trained field engineers to provide services including, PMs and installations on Takano systems.