ALIO Industries precision linear motion system
ASME’s B5.64 standard “Methods for the Performance Evaluation of Single Axis Linear Positioning Systems” appears to confirm that to accurately characterise the repeatability of high-end motion systems, a systematic process must be used. This works by characterising the point repeatability of a stage along the entire axis. This is an argument that ALIO Industries has been making over the past decade.
Key information:
- ASME's B5.64 standard aligns with ALIO Industries' precision linear motion systems.
- The nanometer-level motion control system manufacturer has been advocating for the apparent findings of the report for a decade.
- Using the new systematic process, results should be more accurate as it utilises all repeated results.
ALIO Industries is most well-known for its development of mechanical bearing linear motion systems that can perform at levels that alternate ‘air’ bearing stages struggle to attain. This is a result of the nanometer-level motion control system manufacturer’s focus on 6D Nano Precision.
ALIO’s precision linear motion systems aim to provide highly accurate linear motion along x, y, and z axes. Typically, the system consists of a linear guide rail, a carriage or slider, and a drive system. These elements work together, as the guide rail provides support and guidance for the carriage, while the drive system is what creates the force needed to move the carriage along the rail.
Additionally, these systems could be used in various applications that require highly accurate and smooth operations with the addition of precision elements like high-resolution encoders, state-of-the-art machining, nano-precise metrology and tuning procedures. These applications may include optical inspection, precision machining, and semiconductor manufacturing.
“Because of the exacting nature of the applications where linear motion systems are used, it is vital that they can achieve ultra-high levels of repeatable accuracy. This is why ALIO’s linear motion products have been designed and manufactured to have no equal in terms of performance and reliability,” said Bill Hennessey, President of ALIO Industries. “The ‘6D’ in 6D Nano Precision refers to the 6 dimensions of motion; linear, straightness, flatness, pitch, yaw, and roll. Nano Precision refers to documented proof of performance at or below the +/- 450 nm level. 6D Nano Precision means the documented proof of performance over all 6 degrees of freedom of a body in motion at the nanometer level of precision. We are delighted that the new ASME standard recognises the importance of this approach, and it helps differentiate our linear motion systems from those designed and built to the 2D world of planar repeatability and accuracy.”
Motion systems operate in 3-dimensional space and have errors in 6 degrees of freedom (6-DOF) but are often only characterised by performance data of a single or subset of these 6-DOF. However, this can lead to potentially several error sources unaccounted for in performance data and specifications. Whereas ALIO has previously stated its belief that repeatability performance for metrology inspection and manufacturing systems should be analysed and specified using a point repeatability method which can account for 6D spatial errors. The latter ensures a true representation of nanometer-precision performance. The ASME B5.64 standard has outlined the standards of today and its importance.
“The increasing precision of linear motion systems in particular and all motion systems in general requires a new language which transcends the use of terms like ‘precision’ and ‘resolution’ without any degree of qualification. ALIO’s use of Point Precision and 6D Nano Precision, and now the newly published ASME standard, redefine the way precision motion systems are measured,” concludes Hennessey. “All such initiatives or activities in this area are ultimately of enormous benefit for end-users who should be able to specify solutions that can truly achieve what they need in respect of precision and repeatability. ALIO does not build legacy products and is acutely aware of the 6-dimensional errors associated with simple linear motion. As such, we design and manufacture our linear motion stages with these issues in sharp focus with unique manufacturing techniques and leading-edge components tested to NIST traceable nano results.”