Nova
Nova Metrion.
Nova has announced that its Metrion platform has been selected by “one of the world’s leading” memory manufacturers. The solution will be used in the company’s advanced DRAM R&D, DRAM and NAND high-volume manufacturing lines. By purchasing these new solutions, the memory manufacturer is expecting to see an increase in orders due to the new inline metrology capabilities.
The Nova Metrion works by providing tighter process control and inline secondary ion mass spectrometry (SIMS) measurements of materials composition depth profiles to help improve yields. This solution was selected due to its ability to conduct full-wafer measurements of epitaxial layers, with high precision and sensitivity.
“Bridging the chasm between lab and fab environments is becoming a critical factor in enabling next-generation device manufacturing,” said Gaby Waisman, President and Chief Executive Officer of Nova. “Our ability to provide customers with unique solutions like the Nova Metrion addresses the increasing need for materials process control in advanced memory and logic devices.”
Nova’s solution is designed for high-volume manufacturing environments and to provide quantitative and actionable results with high levels of precision and resolution. Metrion is ideal for control measurement applications like dopant concentration, contamination, residues, and diffusion.