Nikon release automatic wafer measurement system for semiconductor back-end processes
"NEXIV VMZ-NWL 200 alleviates the shortage of skilled technicians for manual measurements."
Nikon’s Industrial Metrology Business Unit has launched its automatic wafer measurement system, the NEXIV VMZ-NWL 200. The system claims to solve challenges that may appear in wafer metrology in the semiconductor back-end process. Traditionally, more manual work is conducted in the back end compared to the front end.
Key information:
- The Industrial Metrology Business Unit at Nikon has launched its automatic wafer measurement system.
- According to its developers, the NEXIV VMZ-NWL 200 will be able to solve issues that may appear in wafer metrology in the semiconductor back-end process.
- Additionally, the new system is said to improve repeatability and reliability, whilst also being easy to use.
Having noted the gap in the measurement process, the NEXIV VMZ-NWL 200’s main target market is measurement centred on semiconductor manufacturing processes in the back end. Additionally, the system hopes to alleviate the shortage of skilled technicians for manual measurements. Nikon’s latest launch was also designed with safety in mind as it features a protective cover to prevent any damage, and it also meets SEMI international standards S2, S8, and F47.
There is an ever-increasing skill level required to conduct measurement processes within the semiconductor industry as it continues along the path of miniaturisation. As this skill requirement increases, the number of available engineers decreases. However, the semiconductor industry is also expanding, but the new opportunities presented can be offered to only select individuals. This has resulted in manual measurements using conventional optical microscopes reaching its limits.
The NEXIV VMZ-NWL 200 claims to automatically measure 6-inch and 8-inch wafers that are in a carrier, according to a measurement program. The reliability of the NEXIV and stability of the wafer loading the NWL ensures the high repeatability of measurements. Additionally, the system allows for the intuitive selection of the chip to be measured using dedicated software. This ensures that any user can achieve the chip measurement results with a high level of reliability, according to the developers. It is also possible to trace both when a measurement was performed and the program that was used, further improving traceability.